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High-κ oxide nanoribbons as gate dielectrics for high mobility top-gated graphene transistors

机译:高κ氧化物纳米带作为高迁移率顶栅石墨烯晶体管的栅极电介质

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摘要

Deposition of high-κ dielectrics onto graphene is of significant challenge due to the difficulties of nucleating high quality oxide on pristine graphene without introducing defects into the monolayer of carbon lattice. Previous efforts to deposit high-κ dielectrics on graphene often resulted in significant degradation in carrier mobility. Here we report an entirely new strategy to integrate high quality high-κ dielectrics with graphene by first synthesizing freestanding high-κ oxide nanoribbons at high temperature and then transferring them onto graphene at room temperature. We show that single crystalline Al2O3 nanoribbons can be synthesized with excellent dielectric properties. Using such nanoribbons as the gate dielectrics, we have demonstrated top-gated graphene transistors with the highest carrier mobility (up to 23,600 cm2/V·s) reported to date, and a more than 10-fold increase in transconductance compared to the back-gated devices. This method opens a new avenue to integrate high-κ dielectrics on graphene with the preservation of the pristine nature of graphene and high carrier mobility, representing an important step forward to high-performance graphene electronics.
机译:由于难以在原始石墨烯上成核高质量氧化物而又不会在碳晶格的单层中引入缺陷,因此将高κ电介质沉积到石墨烯上面临着巨大的挑战。先前在石墨烯上沉积高k电介质的努力通常会导致载流子迁移率显着下降。在这里,我们报告了一种全新的策略,通过首先在高温下合成独立的高κ氧化物纳米带,然后在室温下将它们转移到石墨烯上,将高质量的高κ电介质与石墨烯集成在一起。我们表明,可以合成具有优良介电性能的单晶Al2O3纳米带。使用此类纳米带作为栅极电介质,我们已经证明了迄今为止报道的具有最高载流子迁移率(高达23,600 cm2 / V·s)的顶栅石墨烯晶体管,并且与背衬相比,跨导增加了10倍以上门控设备。该方法为在石墨烯上集成高κ电介质,保留石墨烯的原始性质和高载流子迁移率开辟了一条新途径,这代表了向高性能石墨烯电子学迈出的重要一步。

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